J. Ducrée, H–P Schlosser, T. Glatzel, S. Haeberle, M. Grumann, T. Brenner, R. Zengerle University of Freiburg

Thomas Glatzel (1), Christian Litterst (1), Claudio Cupelli (1), Timo Lindemann (1), Christian Moosmann (2), Remigius Niekrawietz (1), Wolfgang Streule (1), Roland Zengerle (1), Peter Koltay (1) - (1) Laboratory for MEMS Applications, Department of Microsystems Engineering – IMTEK, University of Freiburg and (2) Laboratory for Simulation, Department of Microsystems Engineering – IMTEK, University of Freiburg

J.M. Klein, Y. Bultel, S. Georges - Laboratoire d’Electrochimie et de Physico-Chimie des Matériaux et des Interfaces (LEPMI), M. Pons - Laboratoire de Thermodynamique et de Physicochimie Métallurgique (LTPCM)

A. Bouteville - ENSAM LPMI

David Erickson, Department of Mechanical and Mechanical and Aerospace Engineering, Cornell University