This tutorial is uses the same geometry as CVD Chamber Mixing, but focuses on heat transfer with radiation. Radiation plays an important role within confined geometries where radiative surface properties vary greatly. In this modeling effort, we concentrate on obtaining the temperature distribution inside and on the walls of the chamber when a constant heat flux of 3000 W/m² is generated at the lower surface of the pedestal.

This tutorial sets up simulations of thermally inductively coupled plasma at atmospheric pressure including effects of radiation heat transfer and conjugated flow/wall heat transfer. The tutorial employs the power of user subroutines to define the properties of the Argon gas found in the plasma tube. The relative permittivity, electrical conductivity, specific heat and thermal conductivity of the Argon gas are set using the user subroutines.

This simulation models a two-dimensional axisymmetric geometry based on a Jipelec RTP reactor. The process considered is polysilicon deposition from silane. The model examines the coupled fluid flow, species transport, radiative heat transfer, and temperature distribution at steady state in the reactor.