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CFD-TOPO User Tips

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CFD-ACE+ and CFD-TOPO Coupling
There is a growing demand and challenge in different industries, especially semiconductor and MEMS areas, to have increased wafer size with reduced feature size, i.e. high quality process uniformity.
 

CFD-TOPO: A Tool for Feature Scale Simulation of Semiconductor Processes

CFD-TOPO is a simulation tool that predicts how the shape of entities change due to the combined effects of chemical species transport and surface reactions at gas-solid interfaces. This application provides a wide array of tools to analyze the steps of a semiconductor process on the feature scale of a device (typically the order of micro-meter).

CFD-ACE+ and CFD-TOPO Coupling

There is a growing demand and challenge in different industries, especially semiconductor and MEMS areas, to have increased wafer size with reduced feature size, i.e. high quality process uniformity.


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