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CFD for the Plasma Industry

ESI Group provides software, R&D and customized solutions for various Plasma Technology.

CFD-ACE+ simulates the behavior of plasmas over a wide range of operating conditions. These conditions range from low pressure, non-equilibrium plasmas, requiring Boltzmann solvers, to high pressure, equilibrium plasmas, that can be solved using a continuum approach. CFD-ACE+ provides the option of both Boltzmann and continuum solvers to address these extremes. This flexibility, coupled with CFD-ACE+'s capabilities, enables the simulation of an extensive range of plasma-related applications including semiconductor processing (ICP and CCP reactors), lighting, display panels, thermal plasmas (torches and arcs), and atmospheric plasma.

ESI Group's in-house team of experienced plasma scientists offers in-depth consultation and R&D to suit the customer's needs and supports our Plasma tools.

Prof. Mark Kushner from the University of Illinois at Champaign-Urbana says, "CFD-ACE+ has very impressive capabilities to simulate a wide range
of plasma tools, from low pressure microelectronics fabrication to atmospheric pressure displays."

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Plasma Related Models
Plasma Related Papers
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Thermal Plasma Torch


Fluorescent Lamp
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