ESI Group provides software tools and services for analysis and design support, qualification and optimization of microelectromechanical systems (MEMS) and microfluidics devices. These cutting-edge devices typically utilize multiple, coupled physics effects to achieve the desired results (actuation, pumping, fluid and solid motion etc.).

CFD-ACE+ offers multiphysics solutions for accurate analyses of MEMS and microfluidics devices both at high-fidelity level as well as mixed-dimensionality mode (coupled 1D-2D-3D simulations) for optimum solution strategy. The relevant CFD-ACE+ multiphysics capabilities include coupled solutions of fluid flow, structures, electrostatics, AC/DC conduction, electromagnetics, PZT, free surface flows with surface tension, and MHD. MEMS devices are often built on a layer-by-layer approach and this allows the use of specialized, fast grid generators. CFD-Micromesh is such a grid generator, and can use the process files to rapidly generate grids.

The script-driven grid-generation and solution procedures (with SimManager) are powerful tools for automated grid generation, problem setup and execution of parametric runs of devices involving changes in geometries, and physical and boundary conditions. This environment thus can be used to characterize the performance envelope of a device, or used for design optimization using SimManager, as well as for inverse design of devices tailored for specified performance parameters. The Tesla Valve characterization listed below illustrates performance envelope calculation.

Solutions with CFD-ACE+ have been obtained on a variety of different MEMS and microfluidic devices. This work was performed for different clients (DARPA, NASA, Honeywell Tech.) with data and device details from IMM, Honeywell, and a number of leading academic institutions. Applications include the following:

• Ejection of inkjet droplets
• Filling of a microvessel
• Fluid-structure-electrostatics simulations in a BEAD mesopump (Honeywell)
• Fluid-structure interaction in a passive microvalve
• Microfluidic Oscillator
• Micropump with Tesla valves/dynamic valves
• Tesla valve characterization

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