An accurate, rapid, and quantitative method for analysis of variety of biomolecules, such as DNA and proteins, would benefit many bio-medical applications. These include diagnosis of complex diseases such as cancer, drug discovery, and development of fundamental scientific knowledge regarding signaling pathways. Recent experiments have shown that when specific biological reactions occur on one surface of a microcantilever beam, the resulting changes in surface stress deflect the cantilever beam. To exploit this phenomenon for high-throughput biomolecular analysis, we have developed a chip containing a 2-D array of silicon nitride cantilevers with a thin gold coating on one surface. Integration of microfluid cells on the chip allows for individual functionalization of each cantilever of the array, which is designed to respond specifically 2 to a target analyte. An optical system to readout deflections of multiple cantilevers was also developed. Experiments that test the physical characteristics of the microarray provided statistical information on the drift in cantilever deflections while indicating their repeatability. The cantilevers exhibited thermomechanical sensitivity of 208 nm/K with a standard deviation of 7 percent. They were also found to fall into two categories  those whose deflections tracked each other in response to external stimuli, and those whose did not due to random drift. The best performance of two “tracking” cantilevers showed a maximum difference of 4 nm in their deflections. Although “non-tracking” cantilevers exhibited large differences in their drift behavior, an upper bound of their time-dependent drift was determined, which could allow for rapid bioassays. Using the differential deflection signal between tracking cantilevers, immobilization of 25mer thiolated ssDNA on gold surfaces produced repeatable deflections of 80 nm. Non-specific binding of unthiolated DNA to gold surfaces and exchange of buffer solutions led to only marginal cantilever deflections.