HomeIndustriesProductsServicesPartnersAbout Us

Customer Login

Home arrow CFD Paper Library arrow Software Tool arrow CFD-ACE arrow Study and characterization of a MEMS micromirror device
Study and characterization of a MEMS micromirror device
AT A GLANCE
Software Tool
Industry Area
Request Paper
Authors
Cosme Furlong and Ryszard J. Pryputniewicz Worcester Polytechnic Institute
Abstract
In this paper, advances in our study and characterization of a MEMS micromirror device are presented. The micromirror device, of 510 μm characteristic length, operates in a dynamic mode with a maximum displacement on the order of 10 μm along its principal optical axis and oscillation frequencies of up to 1.3 kHz. Developments are carried on by analytical, computational, and experimental methods. Analytical and computational nonlinear geometrical models are developed in order to determine the optimal loading-displacement operational characteristics of the micromirror. Due to the operational mode of the micromirror, the experimental characterization of its loadingdisplacement transfer function requires utilization of advanced optical metrology methods. Optoelectronic holography (OEH) methodologies based on multiple wavelengths that we are developing to perform such characterization are described. It is shown that the analytical, computational, and experimental approach is effective in our developments.
Keywords
optical sensors, MEMS, MOEMS, micromechatronics, optoelectronic holography, multiple wavelengths
Source
Proc. SPIE, Vol. 5531. Interferometry XII: Techniques and Analysis
Reviews
© 2012 ESI Group CFD Portal