A method has been developed for fabricating polymer microstructures based on electric field induced self assembly and pattern formation. A dielectric fluid placed in between to conductive plates experiences a force in an applied electric field gradient across the plates, which can induce a diffusive surface instability and self construction of the fluid surface. This process is exploited for the fabrication of self assembled polymer microstructures as well as replicated patterns through the use of pre-patterned plates or electrodes. FEM simulation is used to decide the minimum wavelength and electric gradient distribution of polymer structures. A variety of structures in the micron and nanometer scales including bio-fluidic MEMS, polymer optoelectronic devices can be fabricated using this method.