HomeIndustriesProductsServicesPartnersAbout Us

Customer Login

Home arrow CFD Paper Library arrow Software Tool arrow CFD-ACE arrow A Novel AFM Chip for Fountain Pen Nanolithography - Design and Microfabrication
A Novel AFM Chip for Fountain Pen Nanolithography - Design and Microfabrication
AT A GLANCE
Software Tool
Physics Used
Features Used
Industry Area
Request Paper
Authors
Keun-Ho Kim, Nicolaie Moldovan, Changhong Ke and Horacio D. Espinosa Northwestern University
Abstract
A novel atomic force microscopy (AFM) probe has been developed to expand the capability and applications of dip-pen nanolithography (DPN) technology. This new probe has integrated microchannels and reservoirs for continuous ink feed, which allow “fountain-pen” writing called “Fountain Pen Nanolithography” (FPN). Ink is transported from the reservoirs through the microchannels and eventually dispensed onto substrates via a volcano-like dispensing tip. Numerical simulations have been performed to select optimal materials and suitable tip shapes providing a stable fluid-air interface in the tip. Microchannel and dispensing tip have been fabricated by surface micromachining, in particular employing 3 layers of thin films. Fluid flow through the microchannels has been experimentally examined. The probe was used to write on a gold substrate.
Keywords
Source
Mat. Res. Soc. Symp. Proc. Vol. 782 © 2004 Materials Research Society A5.56.1
Reviews
© 2012 ESI Group CFD Portal