Thomas Glatzel (1), Christian Litterst (1), Claudio Cupelli (1), Timo Lindemann (1), Christian Moosmann (2), Remigius Niekrawietz (1), Wolfgang Streule (1), Roland Zengerle (1), Peter Koltay (1) - (1) Laboratory for MEMS Applications, Department of Microsystems Engineering – IMTEK, University of Freiburg and (2) Laboratory for Simulation, Department of Microsystems Engineering – IMTEK, University of Freiburg