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Keun-Ho Kim, Nicolaie Moldovan, Changhong Ke and Horacio D. Espinosa Northwestern University

Vernon Cole and Sam Lowry CFD Research Corporation Deepak Mehra and Donald Gray West Virgina University

U. Forsberg, O. Danielsson, A. Henry, E. Janzen Linkoping University M.K. Linnarsson Royal Institute of Technology

Andrzej Przekwas CFD Research Corp.

Wonchul Sim, Sung-Jun Park, Changsung Park, Youngseuck Yoo, Youngjae Kim, Jaewoo Joung and Yongsoo Oh Samsung Electro-Mechanics Co. Ltd.

Mads Jakob Jensen Technical University of Denmark

Jamil El-Ali, Axel Gu1 nther and Klavs F. Jensen Department of Chemical Engineering, Massachusetts Institute of Technology Suzanne Gaudet and Peter K. Sorger Department of Biology, Massachusetts Institute of Technology

Phillip Stout, H. Q. Yang, Paul Dionne, Andy Leonard, Zhiqiang Tan, Andrzej Przekwas, Anantha Krishnan CFD Research Corp

A.J. Przekwas, H.Q. Yang, M.M. Athavale CFD Research Corp.

Thomas Glatzel (1), Christian Litterst (1), Claudio Cupelli (1), Timo Lindemann (1), Christian Moosmann (2), Remigius Niekrawietz (1), Wolfgang Streule (1), Roland Zengerle (1), Peter Koltay (1) - (1) Laboratory for MEMS Applications, Department of Microsystems Engineering – IMTEK, University of Freiburg and (2) Laboratory for Simulation, Department of Microsystems Engineering – IMTEK, University of Freiburg