The following topics will be discussed in this tutorial.

• Model set up for the simple RF voltage driven CCP
• Electron transport: drift-diffusion; simple colli. Freq.
• Ion transport: drift-diffusion; mobility via Prandtl#
• External circuit (1-capacitor) necessary for RF-CCP
• BC selections: Vsin; V=0; Diele; En=0
• IC for plasma: Ne = SUM(Ni) ~ 1016
• Time step sizes: dt_CCP vs dt_shared
• Parameters on convergence: dt_CCP, iter_CCP, relax(Te)
• How to tell if solution reaches periodic steady-state