ESI Group CFD Portal - Sematech Benchmark Case #5

This simulation models a two-dimensional axisymmetric geometry based on a Jipelec RTP reactor. The process considered is polysilicon deposition from silane. The model examines the coupled fluid flow, species transport, radiative heat transfer, and temperature distribution at steady state in the reactor.

Details

This tutorial demonstrates the setup and solution of the Sematech Benchmark case.

Reading a DTF Grid and building a CFD ACE+ model
Scale the geometry and activate gravity
Setup and apply radiative properties
Defining mixture and mixture properties in database
Setting fluid and solid properties using volume conditions
Setting boundary and initial conditions
Setting solution and output parameters